IV Dachshund Workshop, Drezno, 8-9 maja 2009

4^th Workshop

„AFM-based nanoscale analysis“

May 08 – 09, 2009

Globalfoundries, Dresden

Organizer: BTU Cottbus

Organizing committee

Teodor Gotszalk, TU Wroclaw; Michael Hecker, Globalfoundries Dresden

Program committee

E. Zschech (Globalfoundries), T. Gotszalk (Wroclaw University of Technology), P. Grabiec (ITE Warszawa), D. Schmeißer (TU Cottbus), N. Meyendorf (IZFP Dresden)

Program

Friday, May 08 2009

9.45 – 10.30 Arrival; Labtour for interested participants

10.30 – 11.00 Welcome remarks and opening: E. Zschech

session 1: chair P. Grabiec

11.00 – 11.30 Talk 1 (Wroclaw 1): Grzegorz Wielgoszewski

Investigations of thermal properties on the nanoscale

11.30 – 12.00 Talk 2 (Wroclaw 2): Agata Masalska

Chemical force microscopy

12:00 – 13:30 Lunch; Poster-Session

session 2: chair M. Hecker

13.30 – 14.00 Talk 3 (Gf 1): Peter Hermann

Local strain analysis by NanoRaman spectroscopy

14.00 – 14.30 Talk 4 (Gf 2): Sven Niese

Mechanical characterization of nanoscale Si structures by force-

sensor technique

14:30 – 15:00 short break / Poster discussion

session 3: chair D. Schmeißer

15.00 – 15.30 Talk 6 (ITE): Piotr Grabiec

title to be confirmed

15.30 – 16.00 Talk 7 (BTU): Krzysztof Kolanek

UHV/AFM investigations of the ALD process

16:00 – 16:30 short break

session 4: chair T. Gotszalk

16.30 – 17.00 Talk 8 (Wroclaw 3): Konrad Nieradka

Cantilever based BioMeMS

17.00 – 17.30 Talk 9 (Wroclaw 4): Michał Świątkowski

Biodetectors with quartz microbalances

17.30 – 18.00 Closing remarks E. Zschech

Poster contributions:

• Gf1 David Lehninger: Surface sensitive strain analysis by UV-Raman spectroscopy

• Gf2 Ralf Laas: Mechanical strength and crack propagation in Cu / low-k structures studied by dual-cantilever-beam technique

• Gf3 Fabian Renn: Stress state in strained SiGe/Si line structures analyzed by X-ray scattering

• BTU Matthias Städter: AFM investigation of ferroelectric and organic materials

• WRUT1: Grzegorz Małozięć: Tip etching

• WRUT2: Michał Zielony: DSP based scanning probe microscope controller for high resolution surface scanning and spectroscopy investigations

• WRUT3: Mirek Woszczyna: Multiresonance surface measurements using piezoresistive cantilevers with integrated thermal deflection actuators

• WRUT4: Pawel Zawierucha: Surface scanning using multicantilever arrays

participants:

TU Wrocław:

1. Teodor Gotszalk
2. Agata Masalska
3. Grzegorz Małozięć
4. Zuzanna Kowalska
5. Adam Piotrowicz
6. Konrad Nieradka
7. Michał Świątkowski
8. Grzegorz Wielgoszewski
9. Michał Zielony

Globalfoundries, Dresden:

10. Peter Hermann (Gf, CNT)

11. Sven Niese

12. David Lehninger

13. Ralf Laas

14. Fabian Renn

15. Ehrenfried Zschech

16. Dmytro Chumakov

17. Martin Weisheit

18. Michael Hecker

19. Yvonne Ritz

20. Holm Geisler

BTU Cottbus:

21. Dieter Schmeißer

22. Krzysztof Kolanek

23. Matthias Städter

ITE Warszawa:

24. Piotr Grabiec

25. Pawel Janus

IZFP Dresden:

26. Andre Striegler